Vibrator element and vibrator device
AssigneeSeiko Epson Corporation
InventorsOsamu Kawauchi, Masashi Shimura, Shogo Sasaki
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Abstract
The vibrator element includes a base part, a vibrating arm extending from the base part, and a weight provided to the vibrating arm, wherein the weight includes a thick film part, a thin film part thinner in film thickness than the thick film part, and a connection part which is located between the thick film part and the thin film part to connect the thick film part and the thin film part to each other, and which forms a taper shape gradually decreasing in film thickness in a direction from the thick film part side toward the thin film part.
Claims7
A vibrating element comprising:
- a base part;
- a vibrating arm extending from the base part;
- and
- a weight provided to the vibrating arm, wherein
- the weight includes
- a thick film part,
- a thin film part thinner in film thickness than the thick film part, and
- a connection part which is located between the thick film part and the thin film part to connect the thick film part and the thin film part to each other, and which forms a taper shape gradually decreasing in film thickness in a direction from the thick film part side toward the thin film part.
A vibrator device comprising:
the vibrator element according to claim 1.
Dependencies are inferred from the claim text.