Back to results
US 2021/0242849 A1Published application
Method for manufacturing an electro-acoustic resonator and electro-acoustic resonator device
AssigneeRf360 Europe GmbH
InventorJoachim KLETT
Life of this patent
Estimating the term…
Abstract
A seed layer (210) of a noble metal is formed by electrochemical deposition on a metal electrode (111) disposed on a dielectric layer (110,310). The noble metal seed layer allows the deposition of a highly textured piezoelectric layer (320) on the metal electrode.
Claims17
A method for manufacturing an electro-acoustic resonator, comprising:
- providing a workpiece comprising a dielectric layer;
- forming a metal electrode on the dielectric layer of the workpiece;
- providing a solution containing a salt of a noble metal;
- immersing the workpiece having the metal electrode disposed thereon into the solution to deposit a layer of the noble metal on the metal electrode;
- forming a piezoelectric layer on the metal electrode.
2 more elements
An electro-acoustic resonator device, comprising:
- a dielectric substrate;
- an electrode disposed on the dielectric substrate;
- a layer of a noble metal disposed on the electrode;
- a layer of a piezoelectric material disposed on the layer of a noble metal.
1 more element
Dependencies are inferred from the claim text.