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US 2021/0242807 A1Published application
Linear comb driver with non-uniform fingers for alignment stability at discrete positions
AssigneeLumentum Operations LLC
InventorsWenlin Jin, Gonzalo WILLS
Life of this patent
Estimating the term…
Abstract
A linear comb drive may include a stator. The linear comb drive may include a rotor. At least one of the stator or the rotor may include a comb with one or more horizontally-extending fingers that have a tooth-shape formed by one or more prongs that extend vertically from the one or more fingers in a plane formed by the one or more fingers.
Claims20
A linear comb driver, comprising:
- a stator;
- and
- a rotor,
- wherein at least one of the stator or the rotor includes a comb with one or more horizontally-extending fingers that have a tooth-shape formed by one or more prongs that extend vertically from the one or more fingers in a plane formed by the one or more fingers.
1 more element
A comb driver finger assembly, comprising:
- a base element;
- a finger element attached to the base element and extending in a first direction;
- and
- at least one prong element attached to the finger element and extending in a plane of the finger element and in a second direction perpendicular to the first direction.
1 more element
A micro-electro-mechanical device, comprising:
- a stator comb including a first one or more fingers,
- wherein at least one of the first one or more fingers is associated with a first tooth-shape formed by a first one or more prongs,
- wherein the first one or more prongs extend from the first one or more fingers in a first plane formed by the first one or more fingers,
- a rotor comb including a second one or more fingers,
- wherein at least one of the second one or more fingers is associated with a second tooth-shape formed by a second one or more prongs,
- wherein the second one or more prongs extend from the second one or more fingers in a second plane formed by the second one or more fingers, and
- wherein the first one or more fingers are configured to interleave with the second one or more fingers;
- and
- a movable element mounted to the rotor comb.
6 more elements
Dependencies are inferred from the claim text.