Transport system, processing system, and article manufacturing method

A transport system comprising:

• a stator having a plurality of coils arranged along a transport direction, wherein each of the plurality of coils includes a winding and a core;
• and
• a mover having a plurality of magnets arranged so as to face the plurality of coils and configured to move in the transport direction by electromagnetic force generated between the plurality of coils and the magnet,
• wherein the stator has one of a first transport member and a second transport member that guide, in the transport direction, the mover that is moving,
• wherein the first transport member includes an upper-side transport member and a lower-side transport member installed to be located above and below the second transport member, respectively,
• wherein the mover has the other of the first transport member and the second transport member, and a transport position of the mover is adjusted so that an upper face of at least one magnet is located below or above an equilibrium position where magnetic attractive force generated between the core and the magnet and gravity working on the mover are balanced with each other, and
• wherein the mover is transported in a state where the second transport member is in contact with the lower-side transport member or the upper-side transport member in accordance with the transport position.