Optical semiconductor element and method of manufacturing the same and optical integrated semiconductor element and method of manufacturing the same

An optical integrated semiconductor element comprising:

• a semiconductor substrate including a first region acting as a laser element and a second region acting as a modulator, the first region and the second region being continuous along an optical axis direction of the laser element;
• a first cladding layer of a first conductive type provided in the first region and the second region on the semiconductor substrate;
• a first active layer provided on the first cladding layer and in the first region;
• a second active layer provided on the first cladding layer and in the second region, the first active layer and the second active layer being continuous along the optical axis direction of the laser element;
• a second cladding layer of a second conductive type provided on the first active layer;
• a third cladding layer of a second conductive type provided on the second active layer, the second cladding layer and the third cladding layer being continuous along the optical axis direction of the laser element;
• a first mesa that is in the first region, and is constituted of a part of the first cladding layer, the first active layer, and the second cladding layer;
• a second mesa that is provided in the second region such that the second mesa and the first mesa are continuous along the optical axis direction of the laser element, and is constituted of a part of the first cladding layer, the second active layer, and the third cladding layer;
• an auxiliary cladding layer of the second conductive type provided on the second cladding layer and the third cladding layer;
• a third mesa that is provided in the first region, and is constituted of the auxiliary cladding layer;
• and
• a fourth mesa that is provided in the second region such that the third mesa and the fourth mesa are continuous along the optical axis direction of the laser element, and is constituted of the auxiliary cladding layer;
• and
• a semi-insulating layer provided on the first cladding layer and on both sides of the first mesa, both sides of the second mesa, both sides of the third mesa, and both sides of the fourth mesa, wherein
• a width of the third mesa is greater than a width of the first mesa, and a width of the fourth mesa is greater than a width of the second mesa, and
• the width of the third mesa is greater than the width of the fourth mesa.

A method of manufacturing an optical semiconductor element, the method comprising:

• a step of forming a first cladding layer of a first conductive type on a semiconductor substrate;
• a step of forming an active layer on the first cladding layer;
• a step of forming a second cladding layer of a second conductive type on the active layer;
• a step of forming a first mesa constituted of the first cladding layer, the active layer, and the second cladding layer by etching a part of the first cladding layer, the active layer, and the second cladding layer;
• a step of forming a first semi-insulating layer on the first cladding layer and on both sides of the first mesa;
• a step of causing an auxiliary cladding layer of the second conductive type to be grown on the first mesa and the first semi-insulating layer;
• a step of forming, on the first mesa, a second mesa having a larger width than the first mesa by etching a part of the first semi-insulating layer and the auxiliary cladding layer;
• and
• a step of forming a second semi-insulating layer on the first semi-insulating layer and on both sides of the second mesa, wherein
• a width of the second mesa is greater than a width of the first mesa.

A method of manufacturing an optical integrated semiconductor element on a semiconductor substrate, the semiconductor substrate including a first region acting as a laser element and a second region acting as a modulator, the first region and the second region being continuous along an optical axis direction of the laser element, the method comprising:

• a step of forming a first cladding layer of a first conductive type in the first region and the second region on the semiconductor substrate;
• a step of forming a first active layer on the first cladding layer;
• a step of forming a second cladding layer of a second conductive type on the first active layer;
• a step of removing the first active layer and the second cladding layer in the second region;
• a step of forming a second active layer on the first cladding layer in the second region such that the first active layer and the second active layer are continuous along the optical axis direction of the laser element;
• a step of forming a third cladding layer of the second conductive type on the second active layer in the second region such that the second cladding layer and the third cladding layer are continuous along the optical axis direction of the laser element;
• a step of forming, in the first region, a first mesa constituted of the first cladding layer, the first active layer, and the second cladding layer and forming, in the second region, a second mesa constituted of the first cladding layer, the second active layer, and the third cladding such that the first mesa and the second mesa are continuous along the optical axis direction of the laser element, by etching a part of the first cladding layer, the first active layer, the second cladding layer, the second active layer, and the third cladding layer;
• a step of forming a first semi-insulating layer on the first cladding layer and on both sides of the first mesa and both sides of the second mesa;
• a step of forming an auxiliary cladding layer of the second conductive type on the first semi-insulating layer and on the first mesa and the second mesa;
• a step of forming, on the first mesa, a third mesa that is constituted of the auxiliary cladding layer and has a larger width than the first mesa, by etching a part of the first semi-insulating layer and the auxiliary cladding layer in the first region, and forming, on the second mesa, a fourth mesa that is constituted of the auxiliary cladding layer and has a larger width than the second mesa such that the third mesa and the fourth mesa are continuous along the optical axis direction of the laser element, by etching a part of the first semi-insulating layer and the auxiliary cladding layer in the second region;
• and
• a step of forming a second semi-insulating layer on the first semi-insulating layer and on both sides of the third mesa and both sides of the fourth mesa, wherein
• a width of the third mesa is greater than a width of the fourth mesa.