Laser system
AssigneeGigaphoton Inc.
InventorTakashi ONOSE
Life of this patent
Estimating the term…
Abstract
A laser system including: A. a laser apparatus configured to output a pulse laser beam; B. an optical pulse stretcher including a delay optical path for expanding a pulse width of the pulse laser beam; and C. a phase optical element included in the delay optical path and having a function of spatially and randomly shifting a phase of the pulse laser beam. The phase optical element includes a plurality of types of cells providing different amounts of phase shift to the pulse laser beam and arranged irregularly in any direction.
Claims10
An optical pulse stretcher that expands a pulse width of a pulse laser beam, the optical pulse stretcher comprising:
- a delay optical system including a plurality of mirrors;
- a beam splitter that divides the pulse laser beam into a first pulse laser beam that does not circulate through the delay optical system and a second pulse laser beam that circulates through the delay optical system;
- and
- a phase optical element that is included in the delay optical system and changes speckle distribution of the second pulse laser beam such that the speckle distribution of the second pulse laser beam is different from speckle distribution of the first pulse laser beam,
- the beam splitter dividing the second pulse laser beam having circulated through the delay optical system into a third pulse laser beam that does not circulate through the delay optical system and a fourth pulse laser beam that circulates through the delay optical system, and
- the first pulse laser beam being combined with the third pulse laser beam.
A laser system comprising:
- a laser apparatus;
- an optical pulse stretcher that expands a pulse width of a pulse laser beam output from the laser apparatus;
- and
- an amplifier that amplifies the pulse laser beam, the pulse width of the pulse laser beam having been expanded by the optical pulse stretcher,
- the optical pulse stretcher comprising:
- a delay optical system including a plurality of mirrors;
- a beam splitter that divides the pulse laser beam into a first pulse laser beam that does not circulate through the delay optical system and a second pulse laser beam that circulates through the delay optical system;
- and
- a phase optical element that is included in the delay optical system and changes speckle distribution of the second pulse laser beam such that the speckle distribution of the second pulse laser beam is different from speckle distribution of the first pulse laser beam,
- the beam splitter dividing the second pulse laser beam having circulated through the delay optical system into a third pulse laser beam that does not circulate through the delay optical system and a fourth pulse laser beam that circulates through the delay optical system, and
- the first pulse laser beam being combined with the third pulse laser beam.
Dependencies are inferred from the claim text.