Methods of manufacturing a graphene-based device

A method of manufacturing a graphene-based device, comprising:

• providing a graphene assembly comprising one or more layers of graphene, and a first photoresist layer disposed on the one or more layers of graphene, transferring the graphene assembly onto a substrate comprising at least one cavity so that the one or more layers of graphene traverse the at least one cavity;
• transferring the graphene assembly onto a substrate comprising at least one cavity so that the one or more layers of graphene traverse the at least one cavity;
• using photolithography to expose portions of the graphene on opposite sides of the at least one cavity;
• forming conductive contacts over the exposed portions of graphene;
• and
• removing the first photoresist layer;
• wherein removing the first photoresist layer comprises using critical point drying or immersing the device in a solvent which is then replaced with a low surface tension solvent.

A graphene-based device comprising:

• a substrate comprising a plurality of cavities;
• a plurality of layers of graphene, wherein each layer of graphene is disposed on the substrate and traverses at least one of the plurality of cavities;
• and
• electrical contacts comprising conductive material disposed on the layers of graphene on opposite sides of each of the plurality of cavities.