Semiconductor integrated circuit device
AssigneeSocionext Inc.
InventorsToshio HINO, Junji IWAHORI
Life of this patent
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Abstract
A semiconductor integrated circuit device including standard cells including fin transistors includes, at a cell row end, a cell-row-terminating cell that does not contribute to a logical function of a circuit block. The cell-row-terminating cell includes a plurality of fins extending in an X direction. Ends of the plurality of fins on the inner side of the circuit block are near a gate structure placed at a cell end and do not overlap with the gate structure in a plan view, and ends of the plurality of fins on an outer side of the circuit block overlap with any one of a gate structure in a plan view.
Claims8
A semiconductor integrated circuit device comprising
- a circuit block having first and second cell rows each having a plurality of cells arranged in a first direction, the first and second cell rows being arranged in a second direction perpendicular to the first direction, wherein
- the first cell row includes a first cell-row-terminating cell that does not contribute to a logical function of the circuit block at a first end thereof, and the second row includes a second cell-row-terminating cell that does not contribute to a logical function of the circuit block at a second end thereof, the first end of the first cell row and the second end of the second cell row being at the same position in the first direction,
- a first cell is adjacent to the first cell-row-terminating cell in the first direction, and a second cell is adjacent to the second cell-row-terminating cell in the first direction,
- the first and second cell-row-terminating cells each include:
- a plurality of nanowires extending in the first direction;
- a plurality of pads, the plurality of pads of the first cell-row-terminating cell being connected to the nanowires of the first cell-row-terminating cell, and the plurality of pads of the second cell-row-terminating cell being connected to the nanowires of the second cell-row-terminating cell;
- and
- a plurality of gate structures extending in the second direction and including a first gate structure placed at a cell end on an inner side of the circuit block, and
- the first and second cells each include:
- a plurality of nanowires extending in the first direction;
- a plurality of pads, the plurality of pads of the first cell being connected to the nanowires of the first cell and facing the plurality of pads of the first cell-row-terminating cell, and the plurality of pads of the second cell being connected to the nanowires of the second cell and facing the plurality of pads of the second cell-row-terminating cell,
- the first and second cell-row-terminating cells have cell width different from each other, the cell width being a cell dimension in the first direction.
A semiconductor integrated circuit device comprising
- a circuit block having first and second cell rows each having a plurality of cells arranged in a first direction, the first and second cell rows being arranged in a second direction perpendicular to the first direction, wherein
- the first cell row includes a first cell-row-terminating cell that does not contribute to a logical function of the circuit block at a first end thereof, and the second row includes a second cell-row-terminating cell that does not contribute to a logical function of the circuit block at a second end thereof, the first end of the first cell row and the second end of the second cell row being at the same position in the first direction,
- a first cell is adjacent to the first cell-row-terminating cell in the first direction, and a second cell is adjacent to the second cell-row-terminating cell in the first direction,
- the first and second cell-row-terminating cells each include:
- a plurality of nanowires extending in the first direction;
- a plurality of pads, the plurality of pads of the first cell-row-terminating cell being connected to the nanowires of the first cell-row-terminating cell, and the plurality of pads of the second cell-row-terminating cell being connected to the nanowires of the second cell-row-terminating cell;
- and
- a plurality of gate structures extending in the second direction and including a first gate structure placed at a cell end on an inner side of the circuit block, and a second gate structure adjacent to the first gate structure in the first direction, and
- the first and second cells each include:
- a plurality of nanowires extending in the first direction;
- a plurality of pads, the plurality of pads of the first cell being connected to the nanowires of the first cell and facing the plurality of pads of the first cell-row-terminating cell, and the plurality of pads of the second cell being connected to the nanowires of the second cell and facing the plurality of pads of the second cell-row-terminating cell,
- a third gate structure adjacent to the first gate structure in the first direction,
- the first and second cell-row-terminating cells have cell width different from each other, the cell width being a cell dimension in the first direction,
- the plurality of pads of the first and second cell-row-terminating cells are located between the first gate structure and the second gate structure,
- the plurality of pads of the first and second cells are located between the first gate structure and the third gate structure.
Dependencies are inferred from the claim text.