Semiconductor memory device and manufacturing method thereof
AssigneeSK hynix Inc.
InventorsJae Taek KIM, Hye Yeong JUNG
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AssigneeSK hynix Inc.
InventorsJae Taek KIM, Hye Yeong JUNG
Estimating the term…
A semiconductor memory device, and a manufacturing method of the semiconductor memory device, includes a peripheral transistor, a first insulating layer covering the peripheral transistor, a source layer on the first insulating layer, and a stack structure on the source layer. The semiconductor memory device also includes a peripheral contact structure penetrating the stack structure and the source layer, the peripheral contact structure being electrically connected to the peripheral transistor. The stack structure includes a stepped structure including a step side o surface and a step top surface. The peripheral contact structure is in contact with the step side surface.
A semiconductor memory device comprising:
The semiconductor memory device of claim , further comprising a peripheral line electrically connecting the word line contact and the peripheral contact structure.
A semiconductor memory device comprising:
Dependencies are inferred from the claim text.