Contacts and method of manufacturing the same
AssigneesUnited Microelectronics Corp., Fujian Jinhua Integrated Circuit Co., Ltd.
InventorsFeng-Yi Chang, Fu-Che Lee
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Abstract
A method of manufacturing contacts is provided in the present invention, which include the steps of forming a plurality of mask bars on a substrate, forming a circular mask surrounding each mask bar, wherein the circular masks connect each other and define a plurality of opening patterns collectively with the mask bars, using the mask bars and the circular masks as etch masks to perform an etch process and to transfer the opening patterns and form a plurality recesses in the substrate, and filling up the recesses with metal to form contacts.
Claims9
A method of manufacturing contacts, comprising:
- providing a substrate, wherein said substrate has a plurality of active areas;
- forming a plurality of mask bars on said substrate;
- forming a spacer around each said mask bar, wherein said plurality of spacers connect with each other and define a plurality of opening patterns collectively with said plurality of mask bars;
- performing an etch process using said plurality of mask bars and said plurality of spacers as etch masks to transfer said plurality of opening patterns to said substrate and to form a plurality of recesses in said substrate;
- and
- filling each said recess with conductive material to form contacts, wherein said contacts connect with said plurality of active areas.
Dependencies are inferred from the claim text.