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US 2021/0242073 A1Published application
Planarization apparatus, planarization process, and method of manufacturing an article
AssigneeCanon Kabushiki Kaisha
InventorsSeth J. Bamesberger, Ozkan Ozturk, Christopher Ellis Jones, Se-Hyuk Im
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Abstract
A superstrate for planarizing a substrate. The superstrate includes a body having a first side having a contact surface and a second side having a central portion and a peripheral portion surrounding the central portion. The peripheral portion includes a recessed region.
Claims15
A superstrate for planarizing a substrate, comprising:
- a body having a first side having a contact surface;
- and
- a second side having a central portion and a peripheral portion surrounding the central portion, the peripheral portion including a recessed region.
Dependencies are inferred from the claim text.