Processing apparatus

A processing apparatus comprising:

• a chuck table that includes one surface and the other surface located on an opposite side of the one surface and includes a plate-shaped holding component having a predetermined region formed of a transparent material from the one surface to the other surface;
• a processing unit that processes a workpiece having a predetermined pattern on a front surface side in a state in which the front surface side of the workpiece is held by the one surface of the chuck table and a back surface side of the workpiece is exposed upward;
• a first imaging unit that has a first imaging element and that is disposed over the chuck table and acquires a normal image of the back surface side;
• a third imaging unit that has a third imaging element and that is disposed under the chuck table and acquires a mirror image of the front surface side in a region corresponding to a region imaged by the first imaging unit in a thickness direction of the workpiece;
• and
• a display device that displays at least one of an image of the back surface side acquired by the first imaging unit and an image of the front surface side acquired by the third imaging unit.

A processing apparatus comprising:

• a chuck table that includes one surface and the other surface located on an opposite side of the one surface and includes a plate-shaped holding component having a predetermined region formed of a transparent material from the one surface to the other surface;
• a processing unit that processes a workpiece having a predetermined pattern on a front surface side in a state in which the front surface side of the workpiece is held by the one surface of the chuck table and a back surface side of the workpiece is exposed upward;
• a fourth imaging unit that has a fourth imaging element and that is disposed over the chuck table and acquires a mirror image of the back surface side;
• a second imaging unit that has a second imaging element and that is disposed under the chuck table and acquires a normal image of the front surface side in a region corresponding to a region imaged by the fourth imaging unit in a thickness direction of the workpiece;
• and
• a display device that displays at least one of an image of the back surface side acquired by the fourth imaging unit and an image of the front surface side acquired by the second imaging unit.

A processing apparatus comprising:

• a chuck table that includes one surface and the other surface located on an opposite side of the one surface and includes a plate-shaped holding component having a predetermined region formed of a transparent material from the one surface to the other surface;
• a processing unit that processes a workpiece having a predetermined pattern on a front surface side in a state in which the front surface side of the workpiece is held by the one surface of the chuck table and a back surface side of the workpiece is exposed upward;
• a fourth imaging unit that has a fourth imaging element and that is disposed over the chuck table and acquires a mirror image of the back surface side;
• a third imaging unit that has a third imaging element and that is disposed under the chuck table and acquires a mirror image of the front surface side in a region corresponding to a region imaged by the fourth imaging unit in a thickness direction of the workpiece;
• a display device that displays at least one of an image of the back surface side acquired by the fourth imaging unit and an image of the front surface side acquired by the third imaging unit;
• and
• a control part that has a storing device in which a program to execute image processing is stored and a processor that processes an image in accordance with the program, the control part executing the image processing of either the mirror image of the back surface side or the mirror image of the front surface side to cause the mirror image subjected to the image processing to be displayed on the display device in a state of being inverted in a predetermined direction in order to allow orientation of the mirror image of the back surface side to correspond with orientation of the mirror image of the front surface side.