Substrate processing apparatus and substrate processing system

A substrate processing apparatus, comprising:

• a processing container body which has an internal space capable of accommodating a substrate and an opening communicating with the internal space for passage of the substrate;
• a lid which closes the opening;
• a mover which relatively moves the lid with respect to the opening to open and close the opening;
• and
• a lock mechanism which locks the lid to the processing container body, wherein
• the mover changes a relative position of the lid with respect to the processing container body between a closed position and a separated position, the closed position being a position where the lid is proximate to the processing container body and closes the opening and the separated position being a position where the lid is separated from the opening in a direction opposite to the internal space with a gap space between the lid and the opening for allowing passage of the substrate being conveyed into the internal space defined,
• the lock mechanism includes an arm member which is provided on one of the processing container body and the lid and extends toward the other, and a locking member which restricts a displacement of the arm member by being engaged with the arm member when the lid is at the closed position,
• a tip of the arm member extends toward a side of the other beyond the gap space when the lid is at the separated position, and
• the locking member is engaged with a part of the arm member, the part being located beyond the gap space when the lid is at the separated position.