Mass transfer method and mass transfer device thereof for micro led device
AssigneesBeijing Boe Display Technology Co., Ltd., Boe Technology Group Co., Ltd.
InventorsBohua CHU, Bo ZHOU, Yanming LIU
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AssigneesBeijing Boe Display Technology Co., Ltd., Boe Technology Group Co., Ltd.
InventorsBohua CHU, Bo ZHOU, Yanming LIU
Estimating the term…
This disclosure discloses a mass transfer method and mass transfer device thereof for micro-LED devices, wherein the mass transfer method includes: coating a surface, provided with micro-LED devices, of an epitaxial substrate with a flexible covering solution; curing the flexible covering solution to form a flexible covering layer wrapping the micro-LED devices; turning over the epitaxial substrate with the flexible covering layer wrapping the micro-LED devices, for locating the epitaxial substrate on an upper side of the flexible covering layer; separating the epitaxial substrate from the micro-LED devices; butting a surface, provided with the micro-LED devices, of the flexible covering layer against a receiving substrate; turning over the receiving substrate in butt joint with the micro-LED devices, for locating the flexible covering layer on an upper side of the receiving substrate; and separating the flexible covering layer from the micro-LED devices.
A mass transfer method of micro-LED devices, comprising:
Mass transfer equipment of micro-LED devices, comprising:
Dependencies are inferred from the claim text.