Ceramic heater
AssigneeNGK Insulators, Ltd.
InventorsRyohei MATSUSHITA, Shuichiro MOTOYAMA
Life of this patent
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Abstract
A ceramic heater includes a ceramic plate having a front surface that serves as a wafer placement surface, resistance heating elements that are embedded in the ceramic plate, a tubular shaft that supports the ceramic plate from a rear surface of the ceramic plate, and a thermocouple passage that extends from a start point in a within-shaft region of the rear surface of the ceramic plate, the within-shaft region being surrounded by the tubular shaft, to a terminal end position in an outer peripheral portion of the ceramic plate. The thermocouple passage includes a curved portion between the start point and the terminal end position.
Claims7
A ceramic heater comprising:
- a ceramic plate having a front surface that serves as a wafer placement surface;
- a resistance heating element that is embedded in the ceramic plate;
- a tubular shaft that supports the ceramic plate from a rear surface of the ceramic plate;
- and
- a thermocouple passage that extends from a start point in a within-shaft region of the rear surface of the ceramic plate, the within-shaft region being surrounded by the tubular shaft, to a terminal end position in an outer peripheral portion of the ceramic plate,
- wherein the thermocouple passage includes a curved portion between the start point and the terminal end position.
Dependencies are inferred from the claim text.