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US 2021/0242049 A1Published application
Detachable thermal leveler
OwnerSudarshan NATARAJAN, Wei FAN +2inventors
InventorsSudarshan NATARAJAN, Wei FAN, Xiang LIU, Gregory SHAFFER
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Abstract
An apparatus is shown and described herein that is suitable for supporting a substrate in a process chamber or other application and providing a desired thermal leveling profile. The apparatus is configured to provide a thermal leveler that is detachable from the apparatus.
Claims23
An apparatus comprising a thermal leveler releasably associated with a cover plate.
Dependencies are inferred from the claim text.