Ceramic heater
AssigneeNGK Insulators, Ltd.
InventorsMasaki Ishikawa, Shuichiro Motoyama
Life of this patent
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Abstract
A ceramic heater includes a ceramic plate. The ceramic plate has a wafer placement surface and has an inner-peripheral-side zone that has a circular shape and an outer-peripheral-side zone that has an annular shape. An inner-peripheral-side resistance heating element that has a two-dimensional shape is disposed in the inner-peripheral-side zone. An outer-peripheral-side is resistance heating element that has a coil shape is disposed in the outer-peripheral-side zone. A terminal of inner-peripheral-side resistance heating element and a terminal of the outer-peripheral-side resistance heating element are disposed in the inner-peripheral-side.
Claims5
A ceramic heater comprising:
- a ceramic plate that has a wafer placement surface and that has an inner-peripheral-side zone that has a circular shape and an outer-peripheral-side zone that has an annular shape;
- an inner-peripheral-side resistance heating element that is disposed in the inner-peripheral-side zone and that has a two-dimensional shape;
- and
- an outer-peripheral-side resistance heating element that is disposed in the outer-peripheral-side zone and that has a coil shape,
- wherein a terminal of the inner-peripheral-side resistance heating element and a terminal of the outer-peripheral-side resistance heating element are disposed in the inner-peripheral-side zone.
Dependencies are inferred from the claim text.