Ceramic heater
AssigneeNGK Insulators, Ltd.
InventorsDaichi KUBOTA, Norifumi SHIMAZU
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Abstract
A ceramic heater includes a disc-shaped ceramic substrate that has a wafer placement surface and in which a substrate heater electrode is embedded. The ceramic heater includes a step portion and a step heater electrode. The step portion is annular and extends along an outer periphery of the ceramic substrate to surround the wafer placement surface. The step portion is higher than the wafer placement surface. The step heater electrode is embedded in the step portion. Electric power is supplied to the step heater electrode independently of the substrate heater electrode.
Claims7
A ceramic heater including a disc-shaped ceramic substrate that has a wafer placement surface and in which a substrate heater electrode is embedded, the ceramic heater comprising:
- a step portion that is annular and extends along a outer periphery of the ceramic substrate to surround the wafer placement surface, the step portion being higher than the wafer placement surface;
- and
- a step heater electrode that is embedded in the step portion and to which electric power is supplied independently of the substrate heater electrode.
Dependencies are inferred from the claim text.