Frame feeder
AssigneeKabushiki Kaisha Shinkawa
InventorKazuaki NAGANO
Life of this patent
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Abstract
The present invention includes: a heat plate for heating a lower side of a substrate sliding on an upper surface; and a heat block for heating the heat plate. The heat block includes an air heating flow path for heating air which flows in from a bottom surface side and causing the air to flow out to the heat plate side, the heat plate includes air holes for discharging the air heated by the air heating flow path from the upper surface, the heated air discharged from the air holes forms a heated air atmosphere above the heat plate, and the substrate is transported through the heat air atmosphere. Thereby, curved deformation of the substrate is suppressed.
Claims10
A frame feeder for heating and transporting a substrate, comprising:
- a heat plate for heating a lower side of the substrate sliding on an upper surface of the heat plate;
- and
- a heat block which is laminated on a lower side of the heat plate and heats the heat plate,
- wherein the heat block comprises an air heating flow path for heating air which flows in from a bottom surface side and causing the air to flow out to the heat plate side,
- the heat plate comprises air holes for discharging the air heated by the air heating flow path of the heat block from the upper surface, and
- the heated air discharged from the air holes forms a heated air atmosphere above the heat plate, and the substrate is transported through the heated air atmosphere,
- a flow rate of the air flowing through the air heating flow path is a flow rate at which a temperature of the heated air discharged from the air holes is substantially the same as a temperature of the upper surface of the heat plate.
(canceled)
Dependencies are inferred from the claim text.