Patterned structure

A patterned structure, comprising:

• a plurality of first sub patterns arranged in a first direction and a second direction, wherein the first sub patterns are arranged in the first direction by a first pitch;
• a plurality of second sub patterns arranged in the first direction and the second direction, wherein the second sub patterns are arranged in the first direction by a second pitch;
• and
• a plurality of third sub patterns arranged in the first direction and the second direction, wherein the third sub patterns are arranged in the first direction by a third pitch,
• wherein the first pitch, the second pitch, and the third pitch are equal to one another, and one of the second sub patterns and one of the third sub patterns are disposed between two of the first sub patterns adjacent to each other in the first direction, wherein a first smallest distance exists between one of the first sub patterns and one of the second sub patterns in the first direction, a second smallest distance exists between one of the second sub patterns and one of the third sub patterns in the first direction, and a third smallest distance exists between one of the first sub patterns and one of the third sub patterns in the first direction, wherein at least two selected from the group consisting of the first smallest distance, the second smallest distance, and the third smallest distance are different from one another.