Laser sustained plasma light source with high pressure flow

A broadband light source comprising:

• a pump source configured to generate laser radiation;
• a gas containment vessel configured to receive the laser radiation from the pump source to sustain a plasma within gas flowed through the gas containment vessel, wherein the gas containment vessel is configured to transport gas from an inlet of the gas containment vessel to an outlet of the gas containment vessel;
• a set of collection optics configured to receive broadband radiation emitted by the plasma sustained within the gas containment vessel;
• and
• a recirculation gas loop fluidically coupled to the gas containment vessel, wherein a first portion of the recirculation gas loop is fluidically coupled to the outlet of the gas containment vessel and is configured to receive heated gas or a plume from the plasma from the outlet of the gas containment vessel;
• one or more gas boosters, wherein the one or more gas boosters are fluidically coupled to the recirculation gas loop, wherein an inlet of the one or more gas boosters is configured to receive low pressure gas from the recirculation loop and wherein the one or more gas boosters are configured to pressurize the low-pressure gas into a high-pressure gas and transport the high-pressure gas to the recirculation loop via an outlet;
• and
• wherein a second portion of the recirculation gas loop is fluidically coupled to the inlet of the gas containment vessel and is configured to transport pressurized gas from the two or more gas boosters to the inlet of the gas containment vessel.

An optical characterization system comprising:

• a broadband radiation source, wherein the broadband radiation source comprises:
• a pump source configured to generate laser radiation;
• a gas containment vessel configured to receive the laser radiation from the pump source to sustain a plasma within gas flowed through the gas containment vessel, wherein the gas containment vessel is configured to transport gas from an inlet of the gas containment vessel to an outlet of the gas containment vessel;
• a set of collection optics configured to receive broadband radiation emitted by the plasma sustained within the gas containment vessel;
• a recirculation gas loop fluidically coupled to the gas containment vessel, wherein a first portion of the recirculation gas loop is fluidically coupled to the outlet of the gas containment vessel and is configured to receive heated gas or a plume from the plasma from the outlet of the gas containment vessel;
• one or more gas boosters, wherein the one or more gas boosters are fluidically coupled to the recirculation gas loop, wherein an inlet of the one or more gas boosters is configured to receive low pressure gas from the recirculation loop and wherein the one or more gas boosters are configured to pressurize the low-pressure gas into a high-pressure gas and transport the high-pressure gas to the recirculation loop via an outlet;
• and
• wherein a second portion of the recirculation gas loop is fluidically coupled to the inlet of the gas containment vessel and is configured to transport pressurized gas from the one or more gas boosters to the inlet of the gas containment vessel;
• and
• a set of characterization optics configured to collect a portion of the broadband radiation from the set of collection optics of the broadband radiation source, and direct the broadband radiation onto a specimen, wherein the set of characterization optics is further configured to direct radiation from the sample to a detector assembly.

A method comprising:

• directing laser radiation into a gas containment vessel in order to sustain a plasma within a gas flowing through the gas containment vessel, wherein the plasma emits broadband radiation;
• and
• recirculating the gas through the gas containment vessel via a recirculation gas loop, wherein the recirculating the gas through the gas containment vessel comprises:
• transporting gas from an outlet of the gas containment vessel to an inlet of one or more gas booster assemblies;
• pressurizing the gas within the one or more gas boosters;
• storing the pressurized gas from an outlet of the one or more gas boosters within a pressurized gas reservoir;
• and
• transporting pressurized gas at a selected working pressure from the pressurized gas reservoir to the gas containment vessel.