Charged Particle Beam Device

A charged particle beam device configured to irradiate a sample with a charged particle beam, the charged particle beam device comprising:

• a sample chamber configured to accommodate the sample when the sample is irradiated with the charged particle beam;
• a load lock chamber configured to temporarily accommodate the sample when the sample is taken in and taken out of the sample chamber;
• and
• a computer system configured to control an operation of the charged particle beam device, wherein
• the computer system includes:
• accommodates the sample, and controls a transport device that transports the sample between
• the sample chamber and the load lock chamber;
• and
• a recipe processing unit that executes a recipe describing a procedure for processing the sample by irradiating the sample with the charged particle beam,
• the recipe processing unit predicts a load lock chamber movement time required from when the transport device starts to take out the sample from the container to when the sample is placed in the load lock chamber and an atmospheric door of the load lock chamber is closed, and a load lock chamber exhaustion time required to evacuate the load lock chamber when the load lock chamber accommodates the container,
• the recipe processing unit specifies in advance all processings to be executed when the recipe is executed, required processing times thereof, and an execution order,
• by summing the required processing times while tracing from a last processing to be executed in the execution order in a reverse order, the recipe processing unit specifies a time point at which a total value of the required processing times is equal to or greater than a sum of the load lock chamber movement time and the load lock chamber exhaustion time as a specific time point,
• the recipe processing unit specifies a processing scheduled to be started or scheduled to be during execution at the specific time point as a specific processing in accordance with the required processing times and the execution order, and
• by starting to take out a second sample from the container when the recipe processing unit starts the specific processing for a first sample, the transport control unit transports the first sample from the sample chamber to the load lock chamber and transports the second sample from the load lock chamber to the sample chamber in parallel after the recipe processing unit completes executing the recipe for the first sample.