Probe head and probe card having same
AssigneePoint Engineering Co., Ltd.
InventorsBum Mo AHN, Seung Ho PARK, Sung Hyun BYUN
Life of this patent
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Abstract
Proposed are a probe head and a probe card having the same. According to the present disclosure, the probe head of the probe card includes: an upper guide plate having an upper guide hole; a lower guide plate having a lower guide hole; and an intermediate guide plate having an intermediate guide hole and provided between the upper guide plate and the lower guide plate, wherein each of a plurality of probes sequentially passes through the upper guide hole, the intermediate guide hole, and the lower guide hole, and the intermediate guide plate is made of an anodic oxide film.
Claims7
A probe head of a probe card, the probe head comprising:
- an upper guide plate having an upper guide hole;
- a lower guide plate having a lower guide hole;
- and
- an intermediate guide plate having an intermediate guide hole and provided between the upper guide plate and the lower guide plate,
- wherein each of a plurality of probes sequentially passes through the upper guide hole, the intermediate guide hole, and the lower guide hole, and
- the intermediate guide plate is made of an anodic oxide film.
A probe card, comprising:
- a space transformer having a probe connection pad electrically connected to each of a plurality of probes;
- and
- a probe head provided below the space transformer,
- wherein the probe head comprises:
- an upper guide plate having an upper guide hole;
- a lower guide plate having a lower guide hole;
- and
- an intermediate guide plate provided between the upper guide plate and the lower guide plate, and made of an anodic oxide film.
Dependencies are inferred from the claim text.