Sensor Apparatus for Lithographic Measurements
AssigneeASML Netherlands B.V.
InventorAlessandro POLO
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Abstract
A sensor apparatus comprising an acoustic assembly arranged to transmit an acoustic signal to a substrate and receive at least part of the acoustic signal after the acoustic signal has interacted with the substrate, a transducer arranged to convert the at least part of the acoustic signal to an electronic signal, and, a processor configured to receive the electronic signal and determine both a topography of at least part of the substrate and a position of a target of the substrate based on the electronic signal. The sensor apparatus may for part of a lithographic apparatus or a metrology apparatus.
Claims21
-20. (canceled)
A sensor apparatus comprising:
- an acoustic assembly arranged to transmit an acoustic signal to a substrate having a target, and arranged to receive at least part of the reflected acoustic signal after the acoustic signal has interacted with the substrate;
- a transducer arranged to convert the at least part of the reflected acoustic signal to an electronic signal;
- and
- a processor configured to receive the electronic signal, wherein the processor is configured to determine both a topography of at least part of the substrate and a position of the target based on the electronic signal.
A method of measuring both a topography of at least part of a substrate and a position of a target of the substrate comprising:
- directing an acoustic signal at the substrate;
- receiving at least part of the acoustic signal after the acoustic signal has interacted with the substrate;
- and,
- determining both the topography of the at least part of the substrate and the position of the target of the substrate based on the at least part of the acoustic signal.
Dependencies are inferred from the claim text.