Rgo-based biosensor, manufacturing method of same, and detection method for biomaterial

Abstract

The RGO (Reduced Graphene Oxide)-based bio sensor according to the present invention comprises: a source electrode and a drain electrode formed on a substrate; an RGO channel formed between the source electrode and the drain electrode; a PDMS (polydimethylsiloxane) chip supplying a reaction solution to the RGO channel; a passivation layer for sealing in order to prevent the reaction solution supplied through the PDMS chip from touching the source electrode and the drain electrode; and a gate electrode electrically connected to the reaction solution contacted to the RGO by being supplied through the PDMS chip. At this time, the passivation layer is formed with a SU-8 photoresistor, and the gate electrode is directly contacted to the reaction solution to thereby realize a liquid phase driving. The passivation layer is formed with SU-8 to allow supply of reaction solution through PDMS chip to be conveniently and stably realized. The operation is made possible at a gate voltage of −1.0V˜1.0V due to liquid driving of gate electrode, thereby enabling to realize FET type bio sensor having a high sensitivity.

Dependencies are inferred from the claim text.