Particle analysis using light microscope and multi-pixel polarization filter
AssigneeCarl Zeiss Microscopy GmbH
InventorsIndrajati Nicole KASTANJA, Markus CAPPELLARO, Achim SCHWARZ
Life of this patent
Estimating the term…
Abstract
Techniques in connection with the use of a multi-pixel polarization filter in the light-microscopic examination of a sample object are described. In this way e.g. a particle analysis can be carried out, e.g. in particular for determining the technical cleanness of a surface of the sample object.
Claims15
An optical system, comprising:
- a sample holder configured to fix a sample object,
- a light microscope, which defines an illumination light path and a detection light path for microscopy of the sample object with polarized light,
- at least one camera comprising a multi-pixel detector having a multiplicity of detector pixel elements, and a multi-pixel polarization filter having a multiplicity of polarization filter pixel elements, wherein the multi-pixel polarization filter is arranged between the sample holder and the multi-pixel detector in the detection light path, wherein the multi-pixel detector is configured to provide image data, and
- a computer logic element configured to calculate at least one polarization image of the sample object on the basis of the image data,
- wherein the computer logic element is furthermore configured to carry out a particle analysis for a surface of the sample object on the basis of the at least one polarization image.
A method, comprising:
- controlling a multi-pixel detector associated with a multi-pixel polarization filter, and receiving image data that microscopically image a sample object by means of the multi-pixel detector,
- on the basis of the image data:
- calculating at least one polarization image, of the sample object, and
- on the basis of the at least one polarization image:
- carrying out a particle analysis for a surface of the sample object.
A method of performing light-microscopic examination of a sample object, comprising using a multi-pixel detector having a multiplicity of detector pixel elements, and a multi-pixel polarization filter having a multiplicity of polarization filter pixel elements.
Dependencies are inferred from the claim text.