Pressure sensor using field effect and manufacturing method thereof

A method of manufacturing a pressure sensor using an electric field, the method comprising:

• forming a lower structure including a first electrode extending in a vertical direction and defining a core region, a second electrode disposed to surround the first electrode and generating an electrical field together with the first electrode, a first insulating layer being interposed between the first and second electrodes, and a ground electrode disposed to surround the second electrode;
• forming an upper structure including a membrane being connected to the ground electrode and being positioned to cover the first and second electrodes, the membrane being provided to form an electric field in an adjacent region together with the first and second electrodes, and to make the electric field to distort when an object approaches thereto;
• and
• combining the lower structure with the upper structure.