Pressure sensor
AssigneeAzbil Corporation
InventorsTomohisa TOKUDA, Kouji YUUKI, Tatsuo TANAKA
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AssigneeAzbil Corporation
InventorsTomohisa TOKUDA, Kouji YUUKI, Tatsuo TANAKA
Estimating the term…
The present disclosure enables measurement with satisfactory sensitivity in a low pressure range, and thus accurate measurement in a wider pressure range, by providing a pressure sensor that includes a diaphragm layer and a pressure receiving region formed in the diaphragm layer. In addition, the pressure sensor includes a first piezostrictive element, a second piezostrictive element, a third piezostrictive element, and a fourth piezostrictive element. In addition, the pressure sensor includes a first magnetostrictive element, a second magnetostrictive element, a third magnetostrictive element, and a fourth magnetostrictive element.
A pressure sensor comprising:
Dependencies are inferred from the claim text.