Liquid layer thickness measurement method, measurement device, film production method
AssigneeToray Industries, Inc.
InventorsKenta Nakajima, Nobuhiro Naito
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Abstract
A method of measuring thickness of a liquid layer includes applying a light beam to a liquid layer disposed on a surface of a member, detecting reflected light by a sensor, and analyzing the reflected light according to a spectral interference method with a curve fitting technique to determine the thickness of the liquid layer.
Claims11
1-10. (canceled)
A method of measuring thickness of a liquid layer comprising applying a light beam to a liquid layer disposed on a surface of a member, detecting reflected light by a sensor, and analyzing the reflected light according to a spectral interference method with a curve fitting technique to determine the thickness of the liquid layer.
Dependencies are inferred from the claim text.