Electron Beam Apparatus

An electron beam apparatus configured to perform angular scanning that changes an incident angle of an electron beam incident at a predetermined incident position on a sample, and having a plurality of scanning modes having different scanning speeds of the angular scanning, the electron beam apparatus comprising:

• a scanning coil configured to deflect the electron beam;
• an objective lens configured to swing back the electron beam deflected to the outside of an optical axis by the scanning coil;
• a correction coil disposed in a gap portion of a magnetic pole of the objective lens;
• and
• a main control unit configured to control an electron optical system including the scanning coil, the objective lens, and the correction coil, wherein
• the main control unit is configured to set predetermined phase change amounts with respect to control of the scanning coil in control of the correction coil, and the predetermined phase change amounts differ depending on the plurality of scanning modes.