Characterization System and Method With Guided Defect Discovery

A system comprising:

• a controller including one or more processors configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to:
• receive one or more images of a sample from a characterization sub-system, wherein the one or more images include one or more patch clips;
• identify one or more target clips from the one or more patch clips;
• prepare one or more processed clips based on the one or more target clips;
• generate one or more encoded images by transforming the one or more processed clips via an autoencoder;
• sort the one or more encoded images into a set of clusters via a clustering algorithm;
• display one or more sorted images from one or more of the set of clusters to a user via a user interface;
• receive one or more labels for the one or more displayed sorted images from the user via the user interface;
• determine whether the received one or more labels are sufficient to train a deep learning classifier;
• upon determining the received one or more labels are insufficient to train the deep learning classifier, display additional one or more sorted images to the user via the user interface;
• receive one or more additional labels for the one or more additional displayed sorted images from the user via the user interface;
• determine whether the received additional one or more labels are sufficient to train the deep learning classifier;
• and
• upon determining the received one or more additional labels are sufficient to train the deep learning classifier, train the deep learning classifier via the one of the one or more displayed sorted images, the one or more additional displayed sorted images, the received one or more labels, and the received one or more additional labels.

A method comprising:

• receiving one or more images of a sample from a characterization sub-system, wherein the one or more images include one or more patch clips;
• identifying one or more target clips from the one or more patch clips;
• preparing one or more processed clips based on the one or more target clips;
• generating one or more encoded images by transforming the one or more processed clips via an autoencoder;
• sorting the one or more encoded images into a set of clusters via a clustering algorithm;
• displaying one or more sorted images from one or more of the set of clusters to a user via a user interface;
• receiving one or more labels for the one or more displayed sorted images from the user via the user interface;
• determining whether the received one or more labels are sufficient to train a deep learning classifier;
• and
• upon determining the received one or more labels are sufficient to train the deep learning classifier, training the deep learning classifier via the one or more displayed sorted images and the received one or more labels.

A method comprising:

• receiving one or more images of a sample from a characterization sub-system, wherein the one or more images include one or more patch clips;
• identifying one or more target clips from the one or more patch clips;
• preparing one or more processed clips based on the one or more target clips;
• generating one or more encoded images by transforming the one or more processed clips via an autoencoder;
• sorting the one or more encoded images into a set of clusters via a clustering algorithm;
• displaying one or more sorted images from one or more of the set of clusters to a user via a user interface;
• receiving one or more labels for the one or more displayed sorted images from the user via the user interface;
• determining whether the received one or more labels are sufficient to train a deep learning classifier;
• upon determining the received one or more labels are insufficient to train the deep learning classifier, displaying one or more additional sorted images to the user via the user interface;
• receiving one or more additional labels for the one or more additional displayed sorted images from the user via the user interface;
• determining whether the received one or more additional labels are sufficient to train the deep learning classifier;
• and
• upon determining the received one or more additional labels are sufficient to train the deep learning classifier, training the deep learning classifier via the one or more displayed sorted images, the one or more additional displayed sorted images, the received one or more labels, and the received one or more additional labels.

A system comprising:

• a controller including one or more processors configured to execute a set of program instructions stored in memory, the set of program instructions configured to cause the one or more processors to:
• receive one or more images of a sample from a characterization sub-system, wherein the one or more images include one or more patch clips;
• identify one or more target clips from the one or more patch clips;
• prepare one or more processed clips based on the one or more target clips;
• generate one or more encoded images by transforming the one or more processed clips via an autoencoder;
• sort the one or more encoded images into a set of clusters via a clustering algorithm;
• display one or more sorted images from one or more of the set of clusters to a user via a user interface;
• receive one or more labels for the one or more displayed sorted images from the user via the user interface;
• and
• adjust one or more fabrication tools based on the received one or more labels.

A method comprising:

• receiving one or more images of a sample from a characterization sub-system, wherein the one or more images include one or more patch clips;
• identifying one or more target clips from the one or more patch clips;
• preparing one or more processed clips based on the one or more target clips;
• generating one or more encoded images by transforming the one or more processed clips via an autoencoder;
• sorting the one or more encoded images into a set of clusters via a clustering algorithm;
• displaying one or more sorted images from one or more of the set of clusters to a user via a user interface;
• receiving one or more labels for the one or more displayed sorted images from the user via the user interface;
• and
• adjusting one or more fabrication tools based on the received one or more labels.