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US 2021/0232053 A1Published application
Exposure method and exposure device thereof
AssigneesChongqing Hikc Optoelectronics Technology Co., Ltd., Hikc Corporation Limited
InventorWEI NI
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Abstract
The present application discloses an exposure method and an exposure device thereof. The method includes the following steps: confirming a position of a point to be exposed; capturing and confirming that the point to be exposed is successfully captured; adjusting a light source corresponding to the successfully captured point to be exposed to an adaptive position; and completing an exposure operation by an exposure machine.
Claims17
An exposure method, comprising the following steps:
- confirming a position of a point to be exposed in a region to be exposed;
- capturing the point to be exposed, and confirming that the point to be exposed is successfully captured;
- adjusting a light source corresponding to the successfully captured point to be exposed to an adaptive position;
- and
- completing an exposure operation by an exposure machine using an exposure mask.
2 more elements
An exposure method, comprising the following steps:
- confirming that a point to be exposed is located at a central position of a capture visual field;
- after confirming that the point to be exposed is located at the central position of the capture visual field, adjusting a lens to focus if the point to be exposed is displayed obscurely until the point to be exposed is displayed in an optimal clear state;
- attempting, by the lens, to automatically capture the point to be exposed, and confirming successful capture;
- capturing the point to be exposed for many times, and confirming the number of captures;
- individually configuring a set of light sources for each region to be exposed, sequentially adjusting the light sources for each region to be exposed, and repeatedly adjusting to find the optimal light source;
- calculating a triple standard deviation of a measurement value of the optimal light source;
- and
- when the triple standard deviation is less than 2, completing an exposure operation by the exposure machine using an exposure mask.
5 more elements
An exposure device, comprising:
- a confirming member, configured to confirm a position of a point to be exposed in a region to be exposed;
- a capture member, configured to capture the point to be exposed and confirm that the point to be exposed is successfully captured;
- a light source adjustment member, configured to adjust a light source corresponding to the successfully captured point to be exposed to an adaptive position;
- and
- an exposure machine, configured to complete an exposure operation after the light source of the point to be exposed is adjusted to the adaptive position.
2 more elements
Dependencies are inferred from the claim text.