Optical Module

An optical module comprising:

• a first substrate having a first optical waveguide;
• a first plasmonic waveguide comprising:
• a first end formed of a first metal layer and disposed over an end portion of the first substrate;
• and
• a second end connected to a first end of the first optical waveguide;
• a second metal layer on a side surface continuous with the end portion of the first substrate, wherein the second metal layer is continuous with the first metal layer;
• a second substrate having a second plasmonic waveguide formed of a third metal layer;
• and
• a second optical waveguide connected to the second plasmonic waveguide and disposed on the second substrate;
• wherein the second metal layer and the third metal layer are joined together to connect the first substrate to the second substrate;
• and
• wherein a waveguide direction at the first end of the first plasmonic waveguide located on a side of the end portion of the first substrate coincides with a waveguide direction of the second plasmonic waveguide.

A method comprising:

• providing a first substrate having a first optical waveguide;
• forming a first plasmonic waveguide comprising:
• a first end formed of a first metal layer over an end portion of the first substrate;
• and
• a second end connected to a first end of the first optical waveguide;
• forming a second metal layer on a side surface continuous with the end portion of the first substrate, wherein the second metal layer is continuous with the first metal layer;
• forming a second substrate having a second plasmonic waveguide of a third metal layer;
• and
• connecting a second optical waveguide to the second plasmonic waveguide, wherein the second optical waveguide is disposed on the second substrate;
• wherein the second metal layer and the third metal layer are joined together to connect the first substrate to the second substrate;
• and
• wherein a waveguide direction at the first end of the first plasmonic waveguide located on a side of the end portion of the first substrate coincides with a waveguide direction of the second plasmonic waveguide.