Method and apparatus for improving mems accelerometer frequency response
AssigneeAnalog Devices, Inc.
InventorsKhiem Quang Nguyen, Adam R. Spirer
Life of this patent
Estimating the term…
Abstract
Sensor apparatus and methods for operating the same for measuring acceleration are disclosed. In some embodiments, circuitry inside a sensor digitizes a measured acceleration signal from an accelerometer into a digitized acceleration signal, which is processed by a digital equalization filter within the sensor to provide an equalized acceleration signal. The equalized acceleration signal may have a frequency response that is substantially flat over a frequency range that extends beyond the resonant frequency of a MEMs sensor within the accelerometer of the sensor.
Claims20
A method for operating a sensor apparatus comprising an accelerometer having a microelectromechanical systems (MEMs) sensor, the method comprising:
- measuring an acceleration signal at an output of the accelerometer;
- generating a digitized acceleration signal based on the acceleration signal;
- and
- processing, with a digital equalization filter, the digitized acceleration signal to generate an equalized acceleration signal.
A sensor apparatus comprising:
- an accelerometer having a microelectromechanical systems (MEMs) sensor;
- a non-volatile memory configured to store one or more coefficients representing one or more mechanical characteristics of the MEMs sensor;
- circuitry configured to:
- measure an acceleration signal at an output of the accelerometer;
- generate a digitized acceleration signal based on the acceleration signal;
- and
- a digital equalization filter configured to generate an equalized acceleration signal based on the digitized acceleration signal.
A sensor system, comprising:
- an accelerometer having an output;
- means for equalizing an acceleration signal at the output.
Dependencies are inferred from the claim text.