Monolithic single chip integrated radio frequency front end module configured with single crystal acoustic filter devices

A method for fabricating a monolithic single chip device, the method comprising:

• providing a substrate having an underlying cavity region;
• forming a first piezoelectric layer overlying the substrate;
• processing the first single crystal piezoelectric layer to form a first device within the first piezoelectric layer and within the underlying cavity region;
• forming one or more second piezoelectric layers overlying the first piezoelectric layer;
• and
• processing at least one of the one or more second piezoelectric layers to form a second device;
• wherein the first piezoelectric layer and the one or more second piezoelectric layers form a monolithic stack.