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US 2021/0202294 A1Published application
Susceptor
AssigneeShowa Denko K.K.
InventorsYuichiro MABUCHI, Yoshikazu UMETA
Life of this patent
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Abstract
A susceptor for supporting a disk-shaped wafer when performing a surface treatment, includes a protruding region, and at least three support parts, provided on the protruding region, and configured to support the disk-shaped wafer by making contact with a back surface of the disk-shaped wafer. A ratio of a total area of the support parts with respect to an area of the protruding region is 10% or less in a plan view of the disk-shaped wafer.
Claims10
A susceptor for supporting a disk-shaped wafer when performing a surface treatment, comprising:
- a protruding region;
- and
- at least three support parts, provided on the protruding region, and configured to support the disk-shaped wafer by making contact with a back surface of the disk-shaped wafer,
- wherein a ratio of a total area of the support parts with respect to an area of the protruding region is 10% or less in a plan view of the disk-shaped wafer.
1 more element
Dependencies are inferred from the claim text.