Substrate suction-holding structure and substrate transfer robot

A substrate suction-holding structure comprising:

• a pad main body including an annular contact portion and a bottom wall portion closing a bottom surface of a first vacuum chamber surrounded by the contact portion, the pad main body being conductive;
• a blade main body including an upper surface and a second vacuum chamber formed by depressing the upper surface, the blade main body being conductive;
• a support column provided either on the second vacuum chamber or on the pad main body, causing the contact portion of the pad main body to be located further on an upper side than the upper surface of the blade main body above the second vacuum chamber, and swingably supporting the pad main body with respect to the second vacuum chamber, the support column being conductive;
• a cover secured to the blade main body and covering the second vacuum chamber;
• and
• a suction path extending from the first vacuum chamber and passing through the bottom wall portion of the pad main body, the second vacuum chamber, and the blade main body in this order, the suction path being connected to a vacuum source.