Liquid storage for facility chemical supply system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTzu-Yang LIN, Cheng-Han WU, Chen-Yu LIU, Kuo-Shu TSENG, Shang-Sheng LI, Chen Yi HSU, Yu-Cheng CHANG
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Abstract
A lithography includes a storage tank that stores process chemical fluid, an anti-collision frame, and an integrated sensor assembly. The storage tank includes a dispensing port positioned at a lowest part of the storage tank in a gravity direction. The anti-collision frame is coupled to the storage tank. An integrated sensor assembly is disposed on at least one of the anti-collision frame and the storage tank to measure a variation in fluid quality in response to fluid quality measurement of fluid.
Claims20
A liquid supply system, comprising:
- a storage tank for storing a process chemical fluid, the storage tank including a dispensing port positioned at a lowest part of the storage tank in a gravity direction;
- an anti-collision frame coupled to the storage tank;
- and
- an integrated sensor assembly disposed on at least one of the anti-collision frame and the storage tank to measure a variation in fluid quality in response to a fluid quality measurement of fluid.
A liquid supply system, comprising:
- a storage tank storing process chemical fluid, the storage tank including a liquid dispensing port positioned at a lowest part of the storage tank in a gravity direction;
- an anti-collision frame coupled to the storage tank;
- an integrated sensor assembly disposed on at least one of the anti-collision frame and the storage tank;
- and
- a feedback controller coupled to the integrated sensor assembly and one or more of a process supply source, and fluidic control elements controlling supply and dispense of the process chemical fluid associated with the liquid supply system,
- wherein the feedback controller is configured to adjust one or more parameters of the process chemical fluid and the fluidic control elements controlling the supply and the dispense of the process chemical fluid in response to a measurement result of the integrated sensor assembly.
A method of controlling a feedback control system of a semiconductor process chemical fluid, the method comprising:
- measuring a configurable parameter of the semiconductor process chemical fluid stored in a storage tank;
- performing a fluid quality measurement of fluid by a spectrum analyzer;
- determining whether a variation in fluid quality measurement of the fluid is within an acceptable range;
- and
- in response to a variation in fluid quality measurement that is not within the acceptable range of variation in fluid quality measurement, automatically adjusting the configurable parameter of the semiconductor process chemical fluid to set the variation in fluid quality measurement of the fluid within the acceptable range.
Dependencies are inferred from the claim text.