Micromachined mirror assembly with piezoelectric actuator

A method for controlling a micromachined mirror assembly, comprising:

• suspending a micro mirror over a substrate by at least one beam mechanically coupled to the micro mirror;
• mechanically coupling at least one piezoelectric actuator to the at least one beam;
• and
• applying a first electrical signal to the at least one piezoelectric actuator to cause a piezoelectric material of the at least one piezoelectric actuator to expand in a first direction in parallel with the first axis.

An optical sensing system, comprising:

• a transmitter configured to emit optical signals in a plurality of directions;
• a receiver configured to detect reflected optical signals;
• and
• a micromachined mirror assembly configured to control the directions of the emitted optical signals, the mirror assembly comprising:
• a micro mirror suspended over a substrate by at least one beam mechanically coupled to the micro mirror;
• and
• at least one piezoelectric actuator mechanically coupled to the at least one beam and configured to drive the micro mirror via the at least one beam,
• wherein the at least one piezoelectric actuator is configured to drive the micro mirror to tilt around a first axis based on a first electrical signal applied to the at least one piezoelectric actuator, wherein the first electrical signal causes a piezoelectric material of the at least one piezoelectric actuator to expand in a first direction in parallel with the first axis.