Analysis apparatus, analysis method, and recording medium having recorded thereon analysis program

An analysis method in which an analysis apparatus performs an analysis, the analysis method comprising:

• acquiring, by the analysis apparatus, a plurality of measured values obtained by measuring a device under measurement;
• using, by the analysis apparatus, the plurality of measured values to learn, by machine learning, a model of a position-dependent component that depends on a measured position in the device under measurement;
• and
• separating, by the analysis apparatus, from the plurality of measured values, the position-dependent component which is calculated by using the learned model.

A recording medium having recorded thereon an analysis program that is executed by a computer and causes the computer to function as:

• an acquisition unit configured to acquire a plurality of measured values obtained by measuring a device under measurement;
• a machine learning unit configured to use the plurality of measured values to learn, by machine learning, a model of a position-dependent component that depends on a measured position in the device under measurement;
• and
• an analysis unit configured to separate, from the plurality of measured values, the position-dependent component which is calculated by using the model learned by the machine learning unit.