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US 2021/0199688 A1Published application
Aging compensation of a ferroelectric piezoelectric shock sensor
AssigneeTexas Instruments Incorporated
InventorsScott Robert SUMMERFELT, Benjamin Stassen COOK
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Abstract
A method includes measuring a first signal from a set of pyroelectric devices at a first temperature and measuring a second signal from a set of piezoelectric devices at a first acceleration. The method also includes measuring a third signal from the set of pyroelectric devices at a second temperature and measuring a fourth signal from the set of piezoelectric devices at a second acceleration. The method further includes adjusting a piezoelectric calibration using the first, second, third, and fourth signals.
Claims21
A semiconductor die, comprising:
- piezoelectric devices;
- pyroelectric devices;
- a heater that is thermally-coupled to the pyroelectric devices;
- and
- a finite state machine (FSM) coupled to the piezoelectric devices, the pyroelectric devices, and the heater.
2 more elements
A method, comprising:
- turning on a heater on a semiconductor die;
- measuring a first signal from a set of pyroelectric devices;
- and
- determining a scaling factor for an acceleration measurement.
1 more element
A method, comprising:
- measuring a first signal from a set of pyroelectric devices at a first temperature;
- measuring a second signal from a set of piezoelectric devices at a first acceleration;
- measuring a third signal from the set of pyroelectric devices at a second temperature;
- measuring a fourth signal from the set of piezoelectric devices at a second acceleration;
- and
- adjusting a piezoelectric calibration using the first, second, third, and fourth signals.
3 more elements
Dependencies are inferred from the claim text.