Capacitive sensor

A method of sensing a vibration, comprising:

• providing at least two separated conductive surfaces, and a deflectable element, having an axis of deflection perpendicular to a force generated by the at least two separated conductive surfaces on the deflectable element;
• inducing a voltage potential on the deflectable element with respect to the at least two conductive surfaces;
• and
• sensing a change in induced charge on the at least two conductive surfaces resulting from deflection of the deflectable element along the axis of deflection, wherein the force generated by the at least two separated conductive surfaces on the deflectable element does not substantially alter a deflection of the deflectable element.

A sensor comprising:

• two conductors, each conductor of the two conductors having a planar surface;
• a displaceable electrode configured for movement relative to the two conductors in response to an external condition to be sensed;
• and
• a voltage source configured to supply a bias voltage, the bias voltage establishing an electrostatic field between the displaceable electrode and the planar surfaces of the two conductors;
• wherein:
• the displaceable electrode has a thickness in a direction along the movement and a length in a direction orthogonal to the movement;
• the length and the thickness are chosen such that the displaceable electrode is compliant;
• and
• the two conductors and the displaceable electrode are oriented such that the length of the displaceable electrode is orthogonal to the planar surfaces of the two electrodes.