Glass substrate chemical strengthening furnace apparatus

A glass substrate chemical strengthening furnace apparatus, comprising:

• a bottom portion and a side wall extending from an edge of the bottom portion, wherein the bottom portion and the side wall define a reaction space;
• a plurality of heaters which provides heat to the reaction space;
• and
• a plurality of ultrasonic generators which provides ultrasonic waves to the reaction space,
• wherein the plurality of heaters is disposed in the side wall or adjacent to the side wall, and not disposed in the bottom portion or at upper and lower portions of the bottom portion, and
• wherein the plurality of ultrasonic generators is disposed in the bottom portion or adjacent to the bottom portion.

A glass substrate chemical strengthening furnace apparatus, comprising:

• a bottom portion and a side wall extending from an edge of the bottom portion, wherein the bottom portion and the side wall define a reaction space;
• a plurality of heaters which provides heat to the reaction space;
• and
• a porous ceramic filter which adsorbs fine particles,
• wherein the plurality of heaters includes a side wall heater disposed in the side wall or adjacent to the side wall.