Production method for a micromechanical device having inclined optical windows, and micromechanical device having inclined optical windows

A production method for a micromechanical device having inclined optical windows, the method comprising the following steps:

• S1) providing a first substrate having a first front side and a first rear side and a second substrate having a second front side and a second rear side;
• S2) producing a plurality of through-holes in the first substrate and in the second substrate such that a congruent through-hole is produced in the second substrate for each of the through-holes in the first substrate, which overlap when the first substrate is placed above the second substrate, the first rear side facing the second front side;
• S3) producing a slanted edge region around each respective through-hole of the through-holes in the first substrate and in the second substrate, the edge region laterally encircling the respective through-hole in each case and being inclined at a window angle in relation to a planar extension of the first substrate and the second substrate, wherein two of the slanted edge regions of the first and second substrate, disposed on top of each other when the first substrate is placed above the second substrate, are congruent in a top view and inclined at the same window angle;
• S4) providing a window foil having a structured window region, which covers each of the respective through-holes and at least partially covers the edge regions in a top view of the window foil in each case;
• and
• S5) interposing the window foil between the first rear side of the first substrate and the second front side of the second substrate, the structured window region in each case covering the slanted edge regions and the respective through-holes, and connecting the first rear side in a nonpositive manner to the second front side and the interposed window foil by a joining process, the window foil forming a respective optical window slanted at the window angle above each of the respective through-holes.

A micromechanical device having inclined optical windows, comprising:

• a first substrate having a first front side and a first rear side and a second substrate having a second front side and a second rear side, the first substrate being situated with the first rear side on the second front side on the second substrate, the first rear side facing the second front side;
• a plurality of through-holes in the first substrate and in the second substrate, each through-hole of the through-holes in the first substrate congruently overlapping with a through-hole of the through-holes in the second substrate in each case;
• a slanted edge region situated around each respective through-hole of the through-holes in the first substrate and in the second substrate, each of the edge regions laterally encircling the respective through-hole in each case and being inclined in the first substrate and in the second substrate at a window angle in relation to a planar extension of the first substrate and the second substrate, two slanted edge regions of the edges regions situated on top of each other being congruent in a top view and inclined at the same window angle;
• and
• a window foil situated between the first substrate and the second substrate and covers each respective through-hole and forms an optical window inclined at the window angle in an area of the respective through-hole.