Hermetic package comprising a getter, part comprising such a hermetic package, and associated manufacturing process
AssigneeLynred
InventorsSylvain Lemettre, David Bunel
Life of this patent
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Abstract
The invention concerns a hermetically sealed package forming a low pressure or vacuum enclosure, and receiving at least one component of imaging bolometer type. The hermetically sealed package includes a monolithic layer of a getter material capable of capturing gases present in the enclosure, the layer of getter material having a thickness in the range from 20 nanometers to 200 nanometers.
Claims12
A hermetically sealed package forming a low pressure or vacuum enclosure, and receiving at least one component of imaging bolometer type, said hermetically sealed package comprising a monolithic layer of a getter material capable of capturing gases present in said enclosure, wherein the layer of getter material is deposited on the walls and/or the upper portion of said enclosure and has a thickness in the range from 20 nanometers to 200 nanometers, the layer of getter material being made of zirconium (Zr), of titanium (Ti), of vanadium (V), of hafnium (Hf), of niobium (Nb), of tantalum (Ta), of cobalt (Co), of yttrium (Y), of barium (Ba), of iron (Fe), or of an alloy of these materials.
(canceled)
Dependencies are inferred from the claim text.