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US 2021/0198097 A1Published application
Device and method of fabricating such a device
AssigneeThe University of Manchester
InventorsAravind Vijayaraghavan, Christian Berger
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Abstract
There is disclosed a device and method for fabricating such a device. The device includes cavities formed in a transparent substrate. A laminated membrane is mounted to the substrate and spans the cavities. The laminated membrane includes a layer of a flexible material, typically a polymer, and a layer of a two-dimensional material that is typically graphene.
Claims20
A device comprising:
- a substrate with at least one cavity therein, wherein the substrate is formed of a transparent material;
- a laminated membrane mounted to the substrate, wherein the laminated membrane spans at least part of the cavity, and wherein the laminated membrane includes at least one layer of a flexible material and at least one layer of a two-dimensional material;
- and
- a functional component, wherein the laminated membrane is arranged to deform with respect to a position of the functional component.
1 more element
A method of fabricating a device, the method comprising:
- forming a substrate with at least one cavity therein, wherein the substrate is formed of a transparent material, and
- mounting a laminated membrane to the substrate so that the laminated membrane spans at least part of the cavity, and wherein the laminated membrane includes at least one layer of a flexible material and at least one layer of a two-dimensional material;
- and
- mounting a functional component to the substrate, wherein the laminated membrane is arranged to deform with respect to a position of the functional component.
1 more element
Dependencies are inferred from the claim text.