Reconstruction algorithms of electron-based holograms
AssigneeFEI Company
InventorsKun Liu, Alan Bahm, Marcus Straw
Life of this patent
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AssigneeFEI Company
InventorsKun Liu, Alan Bahm, Marcus Straw
Estimating the term…
Apparatuses and methods for improved reconstructions of electron-based holograms are disclosed herein. An example method at least includes forming a hologram of a sample and a known object, forming a reconstruction of the known object using a reconstruction algorithm, comparing the reconstruction of the known object to a reference reconstruction of the known object, and adjusting the reconstruction algorithm based on the comparison of the reconstruction of the known object to the reference reconstruction of the known object. The example method may further include forming a reconstruction of the sample using the adjusted reconstruction algorithm.
A method comprising:
The method of claim 4, wherein the electron beam is a low energy, coherent electron beam.
The method of claim 10, wherein the sample and known object are deposited together.
An apparatus comprising:
Dependencies are inferred from the claim text.