Touch Substrate, Manufacturing Method Thereof, and Touch Display Device

A manufacturing method of a touch substrate which comprises a touch area and a light shielding area surrounding the touch area, comprising:

• forming a first conductive layer on a base substrate, patterning the first conductive layer to form touch electrodes in the touch area, and forming a second ground wiring in the light shielding area;
• the touch electrodes comprising a first touch electrode and a second touch electrode that cross with each other and are insulated from each other, the first touch electrode comprising a plurality of first sub-touch electrodes which are directly connected, and the second touch electrode comprising a plurality of second sub-touch electrodes which are arranged in a spaced-apart manner;
• forming a first insulating film, patterning the first insulating film to form a first insulating pattern between adjacent second sub-touch electrodes, and forming a second insulating pattern in the light-shielding area, wherein the first insulating pattern covers a connecting portion between adjacent first sub-touch electrodes, the second insulating pattern comprises a first hollow portion to expose a portion of the second ground wiring to form a second terminal of the second ground wiring;
• forming a second conductive layer, patterning the second conductive layer to form bridges for connecting adjacent second sub-touch electrodes on the first insulating pattern, and forming a first ground wiring on the light shielding area to expose the second terminal;
• forming a second insulating film, patterning the second insulating film to form a second hollow portion in the light shielding area, exposing the second terminal from the surface of the touch substrate, and exposing a portion of the first ground wiring from the surface of the touch substrate to form the first terminal of the first ground wiring;
• wherein the first terminal and the second terminal do not overlap with each other in a direction perpendicular to the touch substrate.