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US 2021/0176894 A1Published application
Centrally anchored mems-based active cooling systems
AssigneeFrore Systems Inc.
InventorsAnanth Saran Yalamarthy, Suryaprakash Ganti, Vikram Mukundan, Seshagiri Rao Madhavapeddy, Prabhu Sathyamurthy, Narayana Prasad Rayapati
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Abstract
A cooling system is described. The cooling system includes a cooling element having a central region and a perimeter. The cooling element is anchored at the central region. At least a portion of the perimeter is unpinned. The cooling element is in communication with a fluid. The cooling element is actuated to induce vibrational motion to drive the fluid toward a heat-generating structure.
Claims20
A cooling system, comprising:
- a support structure;
- a cooling element having a central region and a perimeter, the cooling element being supported by the support structure at the central region, at least a portion of the perimeter being unpinned, the cooling element being configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure.
A cooling system, comprising:
- a plurality of cooling cells, each of the plurality of cooling cells including a support structure and a cooling element having a central region and a perimeter, the cooling element being supported by the support structure at the central region, at least a portion of the perimeter being unpinned, the cooling element being configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure;
- and
- an orifice plate having a plurality of orifices therein, a portion of the plurality of orifices corresponding to each of the plurality of cooling cells, the orifice plate being disposed between the cooling element and the heat-generating structure.
A method of cooling a heat-generating structure, comprising:
- driving a cooling element to induce a vibrational motion at a frequency, the cooling element having a central region and a perimeter, the cooling element being supported by a support structure at the central region, at least a portion of the perimeter being unpinned, the cooling element being configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure.
Dependencies are inferred from the claim text.