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US 2021/0175871 A1Published application
Acoustic wave resonator, filter, multiplexer, and wafer
AssigneeTaiyo Yuden Co., Ltd.
InventorRyohei KOMIYAMA
Life of this patent
Estimating the term…
Abstract
An acoustic wave resonator includes a support substrate, a piezoelectric layer that is disposed on the support substrate and is a rotated Y-cut X-propagation lithium tantalate of which a cut angle is within a range of greater than 50° and less than 150°, and a pair of comb-shaped electrodes disposed on the piezoelectric layer, each of the comb-shaped electrodes including a plurality of electrode fingers, an average pitch of the electrode fingers of one of the comb-shaped electrodes being equal to or greater than ½ of a thickness of the piezoelectric layer.
Claims14
An acoustic wave resonator comprising:
- a support substrate;
- a piezoelectric layer that is disposed on the support substrate and is a rotated Y-cut X-propagation lithium tantalate of which a cut angle is within a range of greater than 50° and less than 150°;
- and
- a pair of comb-shaped electrodes disposed on the piezoelectric layer, each of the comb-shaped electrodes including a plurality of electrode fingers, an average pitch of the electrode fingers of one of the comb-shaped electrodes being equal to or greater than ½ of a thickness of the piezoelectric layer.
1 more element
A wafer comprising:
- a support substrate;
- and
- a piezoelectric layer that is disposed on the support substrate, and is a rotated Y-cut X-propagation lithium tantalate of which a cut angle is within a range of greater than 50° and less than 150°.
Dependencies are inferred from the claim text.